15-7 Capacity Limits and Matching Properties of Lateral Flux Integrated Capacitors

نویسندگان

  • Roberto Aparicio
  • Ali Hajimiri
چکیده

Theoretical limits for the capacitance density of lateral flux and quasi-fractal capacitors are calculated. These limits are used to investigate the efficiency of various capacitive structures such as lateral flux and quasi-fractal structures. This study leads to two new capacitor structures with high lateralfield efficiency. Simulation and experimental results demonstrate higher capacity and superior matching properties compared to the standard horizontal parallel plate and previously reported lateral-field capacitors.

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تاریخ انتشار 2001